Holiday Issue December 2004

COMS 2005 Partnering Host

COMS Announcements

COMS 2005 RETURNS TO GERMANY!
21-25 August 2005
Baden-Baden, Germany

COMS 2005 First Call for Papers

This announcement is a call for abstracts for the 10th International Conference on the Commercialization of Micro and Nanosystems (COMS 2005) - the leading conference on the commercialization of MEMS/MST/micromachining and nanotechnology. This conference, organized jointly by Forschungszentrum Karlsruhe and the Micro and Nanotechnology Commercialization and Education Foundation (MANCEF), will be held in Baden-Baden, Germany from 21-25 Aug 2005.

The Conference fosters the commercialization of micro and nanotechnologies and addresses commercialization issues unique to these emerging and disruptive technologies. COMS 2005 will bring together key people from across the world and from every sector of industry, including leading practitioners in the field, equipment suppliers, end users, customers, Government representatives, education and financial experts.

Scope of Conference Topics

COMS2005 addresses recent advances in micro/nanotechnology and their impact on commercial markets. Topics include, but are not restricted to:

Student Poster Session

15 student posters will be accepted and these students will receive a reduction of 50% in the conference fee. The best two papers will get cash awards as prizes. The posters will be judged on their content related to the commercialisation of MEMS/MST and nanotechnology applications.

Key Dates

Abstract Submission Deadline: 20 March 2005
Author Notification: 06 May 2005
Manuscript Deadline: 08 July 2005

For more information, contact:

Peter Bley
COMS Conference Manager
pbley@mancef.org

Advertisement Updated International Micro-Nano Roadmap Now Available The 2004 edition roadmap is a "living document" that has been 6 years in the making. With the introduction of the hugely successful First Edition in September 2002, the Second Edition builds on what the leadership team learned and our customers told us what they needed to know to succeed in the MST marketplace. The CD-ROM version of the International Micro-Nano Roadmap contains both 1st and 2nd Editions. The 2nd edition of the Roadmap will have an accompanying printed version available in January 2005. Members, Affiliate Organizations, and 1st Edition customers receive significant discounts. We encourage becoming a member of MANCEF in order to receive member price of $350 for the roadmap. Individual MANCEF membership costs $150 for two years. The non-member price is $650 for each copy of the Roadmap. Download the Roadmap order form (.pdf) Download the Individual Membership form (.pdf) Download the Roadmap sales brochure (.pdf) What others are saying: "The MANCEF Roadmap was of vital assistance to the development of our own roadmap and strategic direction, providing a global perspective that we apply to the Canadian context. CMC looks forward to contributing to and utilizing the next edition, in support of our vision to accelerate Canada's competitiveness through Microsystems." –Dan Gale, Vice President, Camadian Microelectronics Corporation "Two articles derived from the MANCEF International Roadmap Committee were included in this issue, which has been well-received. These articles reflect well on the work of the professional and your efforts in the area. We look forward to your continued work and use of the knowledge generated in your reports." –Hal Linstone, Technological Forecasting and Social Change What's new in the International Micro-Nano Roadmap Second Edition? Five New Chapters: Nanotechnology MEMS Patents Process and Equipment for MST Equipment and Tooling for MNT RF MEMS Updates are also included: Foundries Packaging and Assembly Complimentary Reports to MANCEF Roadmap: Suppliers of Materials for MST/MEMS Production Henne van Heeren, Enabling M3, The Netherlands Patric Salomon, 4M2C, GmbH, Germany www.enablingMNT.com The exchange of information with MANCEF peers during the roadmap update was an important opportunity for the enablingMNT team to exchange visions and ideas about the MNT industry with other experts. Using latest input from discussions during COMS, we have now finalized our "Materials Suppliers Review". Although still considered to be the smallest of MST/MEMS markets, the demand for specific materials (substrates, resist, etc) is growing. Equally relevant is the fact that users are operating in a fast changing and diverse environment, forcing the suppliers to develop and sustain a range of application specific products. The enablingMNT Review on Suppliers of Materials for MST/MEMS Production shows that a multitude of companies ranging from small start-ups to the chemical and plastics giants are supplying the MST/MEMS community. Having noted the neglect by the suppliers of large quantities for the high volume electronic industries, small companies started to develop customized material solutions for the MST/MEMS market. Their role in the supply chain and the description of further business opportunities make up the analysis in the report, supplemented with detailed material supplier information and profiles. The enablingMNT industry review on Suppliers of Materials for MST/MEMS Production has more than 100 pages, which includes 16 tables, 10 figures and 58 company profiles. See: www.enablingMNT.com

Conference Summary: Commercialization Of Micro and Nano Systems 2004

MANCEF and our COMS2004 partner, NanoMEMS Edmonton, are pleased to announce that 325 members of the global micro/nano community met in Edmonton, Alberta, Canada for the 9th Annual Conference on the Commercialization of Micro and Nano Systems. A total of 17 countries across 4 continents were represented, including delegates from as far away as Zimbabwe.

Articles about the COMS 2004 event from our conference sponsors can be found at:

Small Times magazine

R&D Magazine's October 2004 Micro/Nano newsletter

Micralyne Inc. newsletter

Edmonton Economic Development Corporation newsletter

Coventor Inc. News

In the following sections, we highlight the Educational/Training, Scholarship, Affiliate Organizations, and LIGA Interest Group portions of the COMS 2004, as well as how to purchase your copy of the COMS proceedings.

Training Highlights:

ASME Reliability and Manufacturability MEMS Course

This one day pre-COMS short course was held Sunday 29 August with Mark da Silva, Director of MEMS/MST Technology, Coventor, Inc. instructing. The attendees focused on the reliability and manufacturability of issue for MEMS enabled products. The primary topics and sub-topics addressed included, Introduction to MEMS Reliability and Manufacturability, Reliability - Root Causes & Failure Modes, DFR/DFM CAD Methodology, andProcess Design, Characterization & Planning. The course also included a CD ROM of the full 3-day Reliability course, a nice benefit special for COMS attendees. Look for more short-course offerings from ASME at COMS 2005!

Quality Management and Commercialization of New Technologies

We have the technology.... we have the experience... How do we get a product to market consistently, in the minimum possible time whilst maintaining the highest quality standards?

SJD Training is a corporate training organization specializing in Business Excellence, Quality Assurance and Operations Management This pre-conference workshop focused on the topic that Quality Management Systems (QMS), such as those associated with quality standards (e.g. ISO9000) can be implemented in such a way that we vastly improve the commercialization process, rather than (traditionally) adding "red tape" – a "lean" approach to implementation. This lean approach optimizes processes as well as adding the security of a robust QMS, minimizing the potential time-to-market for new product introduction. The workshop showed how to take a lean approach to the implementation, organization and structure of a QMS. Thus enabling an organization to rapidly implement a system for minimal overhead and maximum benefit. Furthermore this lean approach ensures that the priorities in the implementation phase are driven from customer requirements. SJD Training showed how this in turn leads to shorter product time-to-market and a more robust system for manufacturing subcontracting new technologies. More information and the download of the workshop can be found at www.sjdtraining.com. For further information please contact: Stephen Davies , the Managing Director of SJD Training, at sdavies@sjdtraining.com or (613) 241-9086.

Education Highlight:

A dedicated session relating to MNT Education was organized by a committee headed by Robert Giasolli. NSF Program Manager John "Spud" Bradley gave information on the direction that his agency is taking in creating more education science, technology, engineering and mathematics (STEM) programs. Also, the reports on novel programs, including a new micro/nano high school program in New Mexico, gave important information about educating the populace – at all levels – about small technologies. The education committeee has established a key relationship with FUMEC, which has allowed MANCEF to move forward on an Innovative Science Education grant for a travelling museum exhibit. We also set in motion the beginning stages of creating a peer review team to look at articles and books for micro and nano technology. Interested members willing to participate in the committee's efforts, please contact Steven Walsh swalsh@mancef.org or Robert Giasolli rgiasolli@mancef.org.

Fostering the spirit of education, Michael Jamiolkowski presented the Coventor Software awards. These awards were presented to the best academic papers submitted and earned their universities a free license for CoventorWare. For more information about Coventor scholarships, see the article appearing in this newsletter below.

After all the hard work, conference attendees were treated to a true Western Dinner at Fort Edmonton Park, where the Industry Pioneer Awards were awarded to MANCEF members Kurt Petersen, Joe Mallon, and Janusz Bryzek for their achievements in establishing and growing micro/nano industry. Peter Podesser, CEO of the Industry Pioneer Award sponsor, EVG, was on-hand to present the awards in the name of EVG's founder and industry pioneer, Eric Thallner.

MANCEF and NanoMEMS Edmonton would like to extend thanks to all of our attendees, speakers, and exhibitors for coming out to support the Global Micro/Nano Community. A special thanks to all of our sponsors: Economic Development Edmonton, NanoMEMS Edmonton, Western Economic Diversification Canada, Micralyne, University of Alberta, National Research Council Canada, MESA+, Umicore, Alberta Research Council , CMC , National Post, Sandia National Labs, IVAM, R&D, MicroNano, enablingMNT, mst news, Sensors, Edmonton Journal, Micronews, smalltimes, Nanotechnology.net, and NanoNordic.com.

Conference Summary: Post COMS 2004 Workshop

The New International LIGA Interest Group

The LIGA (an acronym from German words for lithography, electroplating, and molding) technique was first developed at the Forschungszentrum Karlesruhe (FZK) in Germany in the 1980s and its strength is largely based on the precision of X-ray lithography requiring high energy beams of X-rays from synchrotrons. There is an increasing need to determine where the technical and practical boundaries exist for the development and cost effective production of marketable products; and to relate these to developments in nanotechnology. During the last ten years much emphasis has been placed on improving the technique and developing prototypes, but with only a relatively few new products being produced for the market, the challenge is to agree on the establishment of design rules, reliable manufacturing methodologies and to extend the range of materials that can be elecro-formed or micro-moulded. In short, to enable LIGA technology to be exploited effectively, a commercialization strategy needs to be established.

That being said, over 30 delegates from around the world attended an interactive workshop on the "Applications and Commercialisation of LIGA" at the COMS2004 to begin work on such a strategy. An International LIGA Interest Group was formed from those who attended the initial workshop, but will be open to others interested in the activities of the group. The interest group will initially provide communications exchange for practitioners, manufacturing and marketing companies. A LIGA Interest Group web page will be available on the MANCEF site in November 2004. People or organizations who would like to join the interest group should contact David Tolfree (dtolfree@mancef.org).

View the LIGA Interest group website now

Conference Special Highlight: Coventor and MANCEF Award Five MEMS Design Scholarships

Industry standard MEMS software provider, Coventor Inc., along with the Micro and Nanotechnology Commercialization Education Foundation (MANCEF), awarded five MEMS design scholarships to students and their professors during the COMS 2004 conference in Edmonton, Alberta in August. The scholarships were granted based on proposals submitted by students working in micro systems research around the world. Each student will receive a free 1-year license to Coventor's ANALYZER and DESIGNER. CoventorWare software tools to be used in the University setting. Universities were required to be current MANCEF members to be eligible to submit proposals. Proposals were broken up into four categories: Bio MEMS, RF MEMS, Sensors/Actuators and Other Novel Designs. Winners were picked in each category. They are:

• Giorgio Gattiker, PhD candidate at the University of Calgary for his
  "eMosquitoTM": An Actuated Microneedle for Automated Blood Sampling proposal.
• Ariel Lipson, a PhD student at the Optical & Semiconductor Devices Group, E.E.E dept., Imperial College London, UK, for his Photonic Band Gap (PBG) device using nano-sized repetitive crystal structures that enable light manipulation.
• Preeti Sharma of the Indian Institute of Technology, Delhi, for her work in RF and optical MEMS integration and packaging at system-level architecture. Devices include Ka-band micromachined transmission lines, antennas, filters, resonators and switches.
• Greg Thompson of TVI Community College in the Advanced Manufacturing Technologies Program, Alburquerque, NM, for his research and modeling of MEMS actuated cantilever and MEMS pressure sensors.
• Zhen Wang, PhD student at University of Alberta, for his work in proteomics using microfluidics. Mr. Wang has proved that he can integrate protein separation, fractionation, digestion and peptides concentration on the same microfluidic chip.

Each student's work will be published via MANCEF and/or Coventor after they have completed the MEMS research outlined in the winning proposals. Coventor will offer similar scholarship opportunities at COMS 2005.

For more information about CoventorWare software, contact Coventor at 4001 Weston Parkway, Cary, NC, 27513, call 919-854-7500, e-mail Benjamin.Blackwell@coventor.com or visit www.coventor.com. For more information about MANCEF's scholarship opportunities, e-mail RGiasolli@mancef.org or visit www.mancef.org.

ABOUT COVENTOR: COVENTOR, INC. HEADQUARTERED IN CARY, NC PROVIDES A COMPREHENSIVE SUITE OF SOFTWARE DEVELOPMENT TOOLS TARGETING MICRO-ELECTROMECHANICAL SYSTEMS (MEMS), MICROFLUIDICS AND SEMICONDUCTOR PROCESS APPLICATIONS. COVENTORWARE IS AN INDUSTRY STANDARD PLATFORM ADOPTED BY MOST OF THE LEADING MEMS AND MICROFLUIDICS MANUFACTURERS AROUND THE GLOBE, AND BY AN EXTENSIVE NETWORK OF UNIVERSITY PARTNERS. COVENTOR IS A PRIVATELY HELD COMPANY WITH OFFICES IN CAMBRIDGE, MA AND SAN MATEO, CA. EUROPEAN HEADQUARTERS IS IN PARIS, FRANCE. COVENTOR ALSO SERVES ASIA PACIFIC THROUGH REGIONAL DISTRIBUTORS.

Post-COMS Update: MANCEF's Partnership Program Progress

The MANCEF Partnership Committee has changed its name to the Strategic Partnership Committee. Its aims remain the same but the membership is currently being reviewed and expanded to include some of our new GAC members.

The establishment of affiliations with other organizations is a key element in fulfilling the Foundation's objective of building an international MNT community in commercialization and education. MANCEF wishes work with such organizations who have similar aims, particularly where complimentary and common purposes are identified.

At COMS2004, MOUs were signed at a lunchtime ceremony with ITRI, NATEA and FUMEC. These resulted after detailed of discussions with Board members assigned to carry them out:

• ITRI (the Industrial Technology Research Institute, a Taiwan-based non-profit research and development organization), NATEA (the North America Taiwanese Engineers' Association, a non-profit organization founded to promote technological knowledge and its applications, and to provide professional development for Taiwanese Americans and community at large) and MANCEF will jointly promote and market each other's conferences and meetings, and organize and manage nanotechnology and MEMS meetings in Taiwan. They will work together to develop and distribute promotional and educational material, with a particular focus on material supporting the training of professionals in the commercialization of nanotechnology and MEMS, to the parties' membership using the most economical means.

• FUMEC (Fundación México-Estados Unidos para la Ciencia, a U.S.-Mexico bi-national, non- governmental body promoting and supporting science and technology collaboration) and MANCEF will work together to organize and manage micro and nanotechnology events, develop scholarships and exchange programs, and distribute commercialization education materials in support of profressional training in the Americas.

• SEMI (Semiconductor Equipment and Materials International, a global trade association participating in the semiconductor and flat panel display equipment and materials markets) and MANCEF have agreed to work to offer MEMS and nanotech events to engineers and other technical professionals across the global micro-nano community, specifically events in Germany, Taiwan, and the USA planned for 2005. Read more below about one such offered event, the Technology Innovation Showcase, held in conjunction with SEMICON West.

• ASME (the American Society of Mechanical Engineers, a 120,000-member professional organization focused on technical, educational and research issues of the engineering and technology community) has been a MANCEF partner organization since January 2004. ASME and MANCEF have agreed to have ASME offer a series of one-day MEMS-focused tutorials for COMS 2005 attendees in Germany and to explore other global educational event opportunities in Asia and the Americas.

Since COMS, an agreement has been signed with TINYTECHJOBS to provide employment and industry news support to MANCEF's community and website. For more information on TINYTECHJOBS, see the article in this newsletter

Discussions are also taking place with CMC (Canada), Fabless Semiconductor Association (US), IVAM (Germany) and Europractice (Europe).

The current status of the Affiliate Program is shown in the table below:

Members or organizations wishing to participate in the Affiliate programme should contact the Chairman, David Tolfree. (dtolfree@mancef.org)

MANCEF Offers Online Micro-Nano Glossary and Industry Resources Pages

Feeling a little bewildered by some of the jargon used in the Micro-Nano industry? Need to check your definitions before turning in that marketing analysis or newspaper article? Were you doing technical research and wanted to use the appropriate business lingo to describe your commercialization plan? Perhaps you need a handy glossary of technical terms for the appendix of your business plan? As part of MANCEF's new website design and representing the culmination of ten years of industry discussion about the need to standardize references, the foundation is offering an online glossary of Micro-Nano terms. Developed for the MANCEF International Microsystems-Top Down Nano Roadmap, the foundation hopes this will be helpful to all stakeholders across the commercialization process. The Glossary can be found at: www.mancef.org/glossary.htm. Tell your colleagues about this free resource.

As part of our efforts to improve site design, the foundation welcomes helpful comments about improving the website for users. Please forward constructive suggestions to: webmaster@mancef.org.

Promoted Events:

BioMEMS Symposium

The Student Society of Electronics and Communications Engineering at Tecnologico de Monterrey presents its twentieth annual technology symposium. Held 3 -5 March 2005 at the main campus of the Tecnologico de Monterrey in Monterrey, Mexico, the event will focus on BioMEMS technology and applications, supporting systems, opportunities, and MEMS commercialization.

The main program, with its 7 conferences, will allow the participant to learn and analyze the principles of BioMEMS and its latest applications. Specific topics include drug delivery, neuron probes, surgical smart tools, biosensors, artificial implants, microfluidics, lab-on-a-chip and MEMS business. With our seminars in a short course basis or hands on experience, specific topics such as RF MEMS, CAD and Carbon Nanotubes will be discussed in depth, guided by an expert in the field. After the conferences, join our tours to discover the breathtaking natural richness surrounding Monterrey or have some time experiencing the charm and magic of the "City of the Mountains".

Symposium Organizers:
Tecnologico de Monterrey and the Science and Technology Council of the State of Nuevo Leon (COCYTENL)

Contact Information:
Rodrigo Martinez, 52.818.112.0218 or info@biomems.com.mx

See www.mancef.org/events for more information on MANCEF related events

ASME 5th Annual MEMS Technology Seminar
17-20 April, 2005
Hyatt Regency Minneapolis

• Great networking opportunities with your peers and experts in the industry
• Sign up for the Plant Tour and get a first hand view of commercial MEMS. You have two plant tour choices to either the University of Minnesota's Nanofabrication Center or The Process Lab of Honeywell Laboratories
• Register by January 30th and save up to 15% on attendee fees
• Take advantage of Team Discounts! Send 2 or more people to the same seminar and receive a discount

Visit the MEMS V exhibits website today to register or find out about sponsorship opportunities.

The 11th Annual MicroMachine Summit

The 11th MicroMachine Summit will be held 1-4 May 2005 in Dallas, Texas, the first MicroMachine summit to be held in the United States. The Micromachine Summit provides a snapshot of Micro-Nano Technology to worldwide industrial, academic and government initiatives. Three to four key people from each of the most important regions and countries in the Microtechnology arena are invited to participate in the Summit. Four three days, theses delegates gather in a roundtable environment to address topics of special interest and discuss the progress and policies in each country and region. The meeting also hosts a extensive opportunity to develop world-wide networking with leaders in MicroNano Technologies (MNT). For legacy information about this event, please visit the MicroMachine Center website.

The objectives of the Summit are to:

• Educate and deliver information to the attendees on the current state of the major divisions and integration of micro- and nanotechnology
• Introduce the attendees to a network of businesses, universities, government agencies, and industry groups focused on this space
• Provide a forum for world-wide networking with leaders in MicroNano Technologies (MNT)
• Provide opportunities to showcase regional MNT efforts and facilities

The main sessions are devoted to country reports, with delegates providing the latest information from their country and answering questions from other delegates. Observers are also allowed to attend these
sessions. Up to 150 attendees will be considered for the 2005 Summit. Delegates and observers are selected for participation through the Chief Delegate for their country or area.

Chief Delegates for the 2005 Summit are as follows:

• Prof. Ian Bates (Australia)
• Prof. Albert van den Berg (Benelux)
• Dan Gale (Canada)
• Prof. Zhao Ying Zhou (China)
• Dirk Beernaert (European Commission)
• Prof. Emmanuel Bigler (France)
• Prof. Dr. Roland Zengerle (Germany)
• Igal Klein (Israel)
• Mr. Takayuki Hirano (Japan)
• Prof. Paolo Dario (Mediterranean Region)
• Prof. Henrik Jakobsen (Nordic Region)
• Prof. Young-Ho Cho (Republic of Korea)
• Prof. Siak Piang Lim (Singapore)
• Prof. Nico F. de Rooij (Switzerland)
• Dr. Chih-Kung Lee (Taiwan)
• Mr. Geoff Beardmore (United Kingdom)
• Dr. Michael Gaitan (USA)

Sponsorships are available, but will be limited due to the exclusive nature of the event. Please contact Scott Bryant (sbryant@mancef.org or 1.505.255.1826), MANCEF Executive Director for more information on sponsorship opportunities.

Venue:
Renaissance Dallas Richardson Hotel

Summit Organizers:
National Institute of Standards and Technology, Zyvex Corp., and MANCEF.

Contact Information:
Scott Bryant, sbryant@mancef.org, +1.505.255.1826

Call for Innovations:
SEMI Announces SEMICON West 2005 Technology Innovation Showcase Competition

SEMI has announced a "call for innovations" for the third annual Technology Innovation Showcase to be held in conjunction with SEMICON West 2005. The application deadline is February 6, 2005.

The Showcase is designed to highlight innovative companies, inventors and entrepreneurs, and expose their innovations to a broader audience of semiconductor manufacturers, suppliers and investors. This three-day event will be held Tuesday, July 13, through Thursday, July 15 at the Moscone Convention Center in San Francisco.

SEMI encourages participation by individual inventors, small companies and start-ups, academia, and research institutions, as well as large companies. Innovations can include new software, processes, service, equipment or materials used by the semiconductor or related industries including MEMS and Nanotechnology. Innovations must be novel to the semiconductor field, provide practical solutions to real problems in the semiconductor or related industries, have data validating the innovation, and should not be a fully released product within the semiconductor industry (innovations may be fully released within another industry).

A panel of industry experts will review applications and select innovations based on technical merit, relevance, and significance to the semiconductor industry. The Technology Innovation Showcase incorporates technical presentations as well as an exhibit pavilion featuring displays from each of the participating companies.

For more information, applications and for a complete list of rules and requirements, visit www.semi.org/tis or contact Ralph Kirk, SEMI North America, at 1.408.943.6992; rkirk@semi.org.

CONTACTS:
Michael Droeger/SEMI
Ph: 408.943.6953
E-mail: mdroeger@semi.org

Jonathan Davis/SEMI
Ph: 408.943.6937
E-mail: jdavis@semi.org

See www.mancef.org/events for more information on MANCEF related events