| The International LIGA-HARMST Commercialisation Group
Stephan Megtert
Contact information:
UNITE MIXTE DE PHYSIQUE CNRS-Thalès
route Departementale 128
91767 PALAISEAU Cedex
FRANCE
Tel: 33 01 69 41 57 43
stephan.megtert@thalesgroup.com
What I Do
Researcher, Deep x ray lithography.
Areas of HARMST and LIGA that apply to my interests
Deep x ray lithography, synchrotron-based processes, x ray mask manufacture and LIGA.
Collaboration Opportunities
Technology platform for HARMS
Other information
Electroforming, replication processes.
© MANCEF - Micro And Nanotechnology
Commercialization Education Foundation
117 Bryn Mawr Drive SE #27 | Albuquerque, NM 87106 USA | (505) 255-1826
(phone) | (505) 255-1827 (fax)
All rights reserved. Updated: 10 April 2007 |
