|
 |
|
|
 |
 |
 |
 |
 |  |
 |
 |
 |
 |
 |
|
The International LIGA-HARMST Commercialisation Group MANCEF Supported Event: 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology What is LIGA-HARMST? LIGA is the German acronym for X-ray lithography (X-ray Lithographie), Electroforming (Galvanoformung), and Molding (Abformung). HARMST is high aspect ratio microstructures technology that embraces all techniques, including LIGA that can produce microstructures in a variety of materials
The LIGA technique was first developed at the Forschungszentrum Karsluhe (FZK) in Germany in the early 1980s. It's unique value is largely based on the precision obtained by the use of deep X-ray lithography (DXRL) necessitating the use of high energy beams of X-rays from synchrotrons. The technique enables microstructures with high aspect ratios, high precision to be fabricated in a variety of materials (metals, plastics and ceramics). Many of its practitioners and users are associated with or are located close to synchrotron facilities. There is an increasing need to determine where the technical and practical boundaries exist for the development and cost effective production of marketable products; and also to relate these to developments in nanotechnology. UV /Laser beams can be used instead of X-ray from synchrotron sources but have certain limitations and are not as effective at producing precision molds. With the development of improved resists these radiation sources are becoming cost effective when high precision and limited manufacturing is not required. During the last ten years much emphasis has been placed on improving the technique and developing prototypes but with only a relatively few new products being produced for the market. The challenge is to establish design rules, reliable fabrication and manufacturing methodologies for large-scale production of new products for the marketplace. Why a International LIGA-HARMST Commercialisation Group The history of LIGA-HARMST goes back to the late 1980s when the technology was pioneered in Germany at the Forschungszentrum Karlsruhe (FZK) in Germany and its commercial exploitation by the company microPArts in the 1990s. Since that time very few companies have exploited these technologies and therefore commercialisation has not progressed. There are a number of reasons for this but the lack of design rules, uncertainty about the ability of the processes to achieve precision in different materials, the absence of a manufacturing methodology, the lack of access to suitable synchrotron radiation sources for X-ray lithography and the issues of knowledge and technology transfer from laboratory to industry are some of the main barriers. HARMST technologies were the first to bring precision microfabrication to non-silicon materials but their processes have remained outside of the mainstream development of MEMS and MST. Now that nanotechnology has become the main thrust for research even greater emphasis on sub-micron precision is sought for new microproducts. There is a perceived renewed interest in HARMST and LIGA processes. International workshops are always well attended, mainly by researchers but a growing number of companies are now using the processes so there is a community. An interactive workshop on the 'Applications and Commercialisation of LIGA' held at the COMS2004 conference in Edmonton, Canada, over 40 delegates from centres around the world, including the US, Canada, Australia, and Germany. There was a consensus from the meeting that to enable HARMST-LIGA technologies to be exploited effectively, the range of interest and size of the global community needed to be determined and a commercialisation strategy established. Thismust provide a market-oriented focus for the facilities, people and organisations engaged in developing and using the fabrication processes. The first step was taken and some pages were pasted on the MANCEF website. At last year's COMS2006 Conference at St Petersburg in Florida a similar workshop was held for members. It was decided that further progress could be made if a more formal group dedicated to commercialisation be formed and a membership fee levied to enable a members website and some supporting administration established. Dr Volker Saile and David Tolfree agreed to co-chair the new group and would ask MANCEF to provide an updated interactive website for the new group. Its initial objectives are outlined below.
Members
International LIGA-HARMST Commercialisation Group Lead Organizing Sponsors
Contact Us If you are interested in this group, please contact Dr. David Tolfree at dtolfree@mancef.org. © MANCEF - Micro And Nanotechnology Commercialization
Education Foundation |
An X-ray sensitive resist bonded to an electrically conductive substrate is exposed to parallel beams of high energy X-rays from a synchrotron radiation source through a mask partly covered with a strong X-ray absorbing material defining the desired pattern. Chemical removal of exposed /unexposed parts result in a three dimensional (3D) stucture in the resist which can be filled by electrodepositing a metal. The resist is chemically stripped away to produce a mold insert. The mold insert is used to produce micro-parts in polymers or ceramics by injection molding. 
